Silicon Carbide: A Gas Sensing Material for Selective Detection of SO2

ZnO nanoparticles as sensing materials with high gas response for detection of n-butanol gas

The high crystallinity ZnO nanoparticles with an average particle diameter 30 nm have been successfully synthesized with a surfactant-mediated method. The cationic surfactant (cetyltrimethylammonium bromide, CTAB) and the hydrous metal chlorides (ZnCl2⋅2H2O) appear to be the good candidates for obtaining a high yield of nanoparticles. The structural and morphological characterizations were carr...

Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications

We investigated SiC-based hydrogen gas sensors with metal-insulator-semiconductor (MIS) structure for high temperature process monitoring and leak detection applications in fields such as the automotive, chemical and petroleum industries. In this work, a thin tantalum oxide (Ta2O5) layer was exploited with the purpose of sensitivity improvement, because tantalum oxide has good stability at high...

Silicon Carbide Bipolar Junction Transistors for High Temperature Sensing Applications

Silicon Carbide Bipolar Junction Transistors for High Temperature Sensing Applications

Vertical Silicon Nanowire Arrays for Gas Sensing

The goal of this research was to fabricate and characterize vertically aligned silicon nanowire gas sensors. Silicon nanowires are very attractive for gas sensing applications and vertically aligned silicon nanowires are preferred over horizontal nanowires for gas sensing due to the high density of nanowire arrays and the increased nanowire surface area per substrate area. However, the developm...

Etching of Silicon Carbide Using Chlorine Trifluoride Gas